MSE PRO Vacuum Magnetron Sputter Coater
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MSE PRO Vacuum Magnetron Sputter Coater
Introduction
The MSE PRO Vacuum Magnetron Sputter Coater is a compact and efficient thin-film deposition system based on physical vapor deposition (PVD) technology. It utilizes magnetron sputtering to deposit uniform, high-purity coatings by ejecting target material particles in a controlled vacuum environment. Designed for laboratory use, including SEM sample preparation, it offers precise control, reliable performance, and user-friendly operation, making it suitable for both beginners and advanced users.
Key Features
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Advanced PVD Technology
Utilizes magnetron sputtering for high-quality, uniform thin-film deposition. -
Real-Time Monitoring
Equipped with vacuum and sputtering current meters for process visibility. -
Precise Process Control
Adjustable sputtering current and vacuum gas valve for optimal coating conditions. -
Uniform & High-Purity Coatings
Large-capacity chamber and optimized target design ensure consistent film quality. -
Durable Sealing Design
Reinforced glass bell jar with specialized sealing ring prevents damage during long-term use. -
High-Quality Electrode System
Ceramic-sealed high-voltage components for improved durability and reliability. -
Efficient Cooling System
Peltier-cooled sputter head enhances coating performance; optional water cooling available. -
Compact & Space-Saving Design
Ideal for laboratories with limited space. -
User-Friendly Operation
Simple controls make it suitable for beginners and research environments. -
Flexible Material Compatibility
Suitable for sputtering metals such as Au, Ag, Cu, and more.
Specifications
| Model | MSE PRO Vacuum Magnetron Sputter Coater |
|---|---|
| Target Size | Ø50 mm |
| Target Thickness | 0.1 – 0.5 mm |
| Vacuum Chamber Size | Ø160 × 120 mm |
| Vacuum Degree | ≤ 4 × 10⁻² mbar |
| Maximum Current | 50 mA (optional 100 mA) |
| Limit Voltage | 1600 V DC |
| Time Setting Range | Up to 9999 s |
| Micro Vacuum Valve | Ø3 mm hose connection |
| Mechanical Pump | 2 L/s |
| Suitable Target Materials | Au, Ag, Cu, and other metals |
| Cooling System | Peltier cooling (optional water cooling) |
| Power Supply | AC 110V / 60 Hz |
| Equipment Dimensions | 360 × 300 × 380 mm |
| Gross Weight | 50 kg |
| Net Weight | 15 kg |
| Operating Conditions | ≤1000 m altitude; 25℃±15℃; 55%RH±10%RH |
| Gas Requirement | Argon ≥99.99% purity |
| Water Requirement | Deionized or pure water (for cooling system) |
| Work Table Requirement | ≥600 × 600 × 700 mm, ≥50 kg load capacity |
MSE offers a range of sputter coaters. Please contact us for more information.