MSE PRO Vacuum Magnetron Sputter Coater

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SKU: MA0067671
Regular price $ 19,314.95

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MSE PRO Vacuum Magnetron Sputter Coater

Introduction

The MSE PRO Vacuum Magnetron Sputter Coater is a compact and efficient thin-film deposition system based on physical vapor deposition (PVD) technology. It utilizes magnetron sputtering to deposit uniform, high-purity coatings by ejecting target material particles in a controlled vacuum environment. Designed for laboratory use, including SEM sample preparation, it offers precise control, reliable performance, and user-friendly operation, making it suitable for both beginners and advanced users.

Key Features

  • Advanced PVD Technology
    Utilizes magnetron sputtering for high-quality, uniform thin-film deposition.
  • Real-Time Monitoring
    Equipped with vacuum and sputtering current meters for process visibility.
  • Precise Process Control
    Adjustable sputtering current and vacuum gas valve for optimal coating conditions.
  • Uniform & High-Purity Coatings
    Large-capacity chamber and optimized target design ensure consistent film quality.
  • Durable Sealing Design
    Reinforced glass bell jar with specialized sealing ring prevents damage during long-term use.
  • High-Quality Electrode System
    Ceramic-sealed high-voltage components for improved durability and reliability.
  • Efficient Cooling System
    Peltier-cooled sputter head enhances coating performance; optional water cooling available.
  • Compact & Space-Saving Design
    Ideal for laboratories with limited space.
  • User-Friendly Operation
    Simple controls make it suitable for beginners and research environments.
  • Flexible Material Compatibility
    Suitable for sputtering metals such as Au, Ag, Cu, and more.

Specifications

Model MSE PRO Vacuum Magnetron Sputter Coater
Target Size Ø50 mm
Target Thickness 0.1 – 0.5 mm
Vacuum Chamber Size Ø160 × 120 mm
Vacuum Degree ≤ 4 × 10⁻² mbar
Maximum Current 50 mA (optional 100 mA)
Limit Voltage 1600 V DC
Time Setting Range Up to 9999 s
Micro Vacuum Valve Ø3 mm hose connection
Mechanical Pump 2 L/s
Suitable Target Materials Au, Ag, Cu, and other metals
Cooling System Peltier cooling (optional water cooling)
Power Supply AC 110V / 60 Hz
Equipment Dimensions 360 × 300 × 380 mm
Gross Weight 50 kg
Net Weight 15 kg
Operating Conditions ≤1000 m altitude; 25℃±15℃; 55%RH±10%RH
Gas Requirement Argon ≥99.99% purity
Water Requirement Deionized or pure water (for cooling system)
Work Table Requirement ≥600 × 600 × 700 mm, ≥50 kg load capacity

 

MSE offers a range of sputter coaters. Please contact us for more information.