MSE PRO Ruthenium Sputtering Target Ru
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Specifications for Ruthenium Sputtering Target
| Material Type | Ruthenium |
| Symbol | Ru |
| Atomic Weight | 101.07 |
| Atomic Number | 44 |
| Color/Appearance | Silvery White Metallic |
| Thermal Conductivity | 120 W/m.K |
| Melting Point (°C) | 2,310 |
| Coefficient of Thermal Expansion | 6.4 x 10-6/K |
| Theoretical Density (g/cc) | 12.3 |
| Z Ratio | 0.182 |
| Sputter | DC |
| Max Power Density (Watts/Square Inch) |
100* |
| Type of Bond | Indium, Elastomer |