MSE PRO 4 inch Aluminum-Silicon (Al-Si) Thin Film on Silicon Wafer

MSE PRO™ 4 inch Aluminum-Silicon (Al-Si) Thin Film on Silicon Wafer

The Aluminum-Silicon (Al-Si) Thin Film boasts remarkable thermal stability. The nanoporous material fabricated from the Al–Si film can be used as a template for various kinds of ultrahigh density nanowires and nanoporous semiconductor silicon thin films. The thin film has diverse applications in microelectronics, sensors, and optoelectronic devices.

Specifications:

Reference:

[1] Ryoko Horie, Nobuhiro Yasui, Yoshihiro Ohashi, Tohru Den, Substrate bias effect on Al–Si and Al–Ge thin film structure, Thin Solid Films, Volume 516, Issue 23, 2008, Pages 8315-8318.

[2] M.G. Gentile, J.A. Muñoz-Tabares, A. Chiodoni, C. Sgorlon, I. Para, R. Carta, G. Richieri, K. Bejtka, L. Merlin, E. Vittone, Marbled texture of sputtered Al/Si alloy thin film on Si, Thin Solid Films, Volume 612, 2016, Pages 165-171.