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MSE PRO 12 Inch Wafer Front Opening Unified Pod (FOUP)

  • $ 98995
  • Save $ 11005


MSE PRO™ 12 Inch Wafer Front Opening Unified Pod (FOUP)

The Front Opening Unified Pod (FOUP) is an inter-process transfer container widely utilized in the semiconductor manufacturing industry. Its primary function is to safeguard semiconductor wafers from external impacts and maintain a high level of cleanliness to prevent contamination from external factors during the manufacturing process. It is widely used for delicate wafer storage. 

Specifications:

SKU# CA0501
Dimensions

Width 385mm

Depth 331mm

Height 330mm

Net weight (empty) 4.57+/-0.05kg
Wafer spacing 10mm
Capacity up to 25 wafers
Suitable wafer size 300mm
Pack size Pack of 1pc
Storage Light protected, <40degC, <95%RH
Surface Particle
  • 0.2um <3000ea/mL
  • 0.5um <400ea/mL

Chemical characteristics 

(ug/g)

  • F- <500
  • Cl- <2000
  • Br- <5
  • NO3- <800
  • SO42- <1500
  • PO43- <200