MSE PRO Silicon Nitride Sputtering Target Si3N4
Silicon Nitride (Si3N4) Sputtering Target Specifications
To add a Cu Backing Plate with Indium Bonding for Sputtering Targets 
| Material | Silicon Nitride |
| Purity (%) | 99.5 |
| CAS Number | 12033-89-5 |
| Chemical Formula |
Si3N4 |
| Molar Mass (g/mol) | 140.283 |
| Color/Appearance | White to Gray or Dark Gray to Black, Crystalline Solid |
| Melting Point (°C) | 1,900 |
| Theoretical Density (g/cm3) | 3.17 |
| Z Ratio | 1.00 |
| Sputter | RF, RF-R |
| Max Power Density (Watts/Square Inch) |
20 |
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