MSE PRO Ruthenium Sputtering Target Ru

SKU: TA3320

To better serve you, we would like to discuss your specific requirement.
Please Contact Us for a quote.

Specifications for Ruthenium Sputtering Target

Material Type	Ruthenium
Symbol	Ru
Atomic Weight	101.07
Atomic Number	44
Color/Appearance	Silvery White Metallic
Thermal Conductivity	120 W/m.K
Melting Point (°C)	2,310
Coefficient of Thermal Expansion	6.4 x 10^-6/K
Theoretical Density (g/cc)	12.3
Z Ratio	0.182
Sputter	DC
Max Power Density (Watts/Square Inch)	100*
Type of Bond	Indium, Elastomer