Menu
Cart
10x10 mm AlGaN/GaN HEMT on Si Wafer (GaN/Si) - MSE Supplies LLC

MSE PRO 10x10 mm AlGaN/GaN HEMT on Si Wafer (GaN/Si)

  • £15800


10x10 mm AlGaN/GaN high electron mobility transistors (HEMTs) grown on silicon substrate

HEMT structure for 650 V power electronics applications

Special layer structures can be custom made upon request. Please contact us for a quote. D-mode HEMT, E-mode HEMT, RF HEMT wafers are available upon request.

  • Product SKU#: WA0249
  • Thickness of GaN cap layer: 3 nm
  • AlGaN composition: 26% Al, 74% GaN
  • AlGaN barrier layer thickness: 25 nm
  • AlN inter-layer thickness: 1 nm
  • Thickness of GaN layer: 2 um
  • Thickness of buffer layer: ~ 1 um
  • Thickness of Si (111) substrate: 1000 um 
  • Sheet resistance (Ohms per square): < 420
  • Electron mobility: > 1300 cm2/V-sec for Si substrate
  • Sheet carrier concentration (/cm): ~ 1E13
  • Breakdown voltage: > 1000 V
  • Bow: < 60 um
  • RMS roughness (AFM): < 0.5 nm (5 um x 5 um area)
  • 2 um GaN layer Resistivity: > 1E5 Ohm.cm

    Related Publications


    We Also Recommend
    High Purity Alumina (Al<sub>2</sub>O<sub>3</sub>) Boat Crucible Rectangular - MSE Supplies LLC

    MSE PRO High Purity Alumina (Al2O3) Boat Crucible Rectangular

    £1200
    5 mm Spherical Premium Yttria Stabilized Zirconia YSZ Milling Media, 1 kg - MSE Supplies LLC

    MSE PRO 5 mm Spherical Premium Yttria Stabilized Zirconia YSZ Milling Media, 1 kg

    £7600
    2 inch Sapphire Wafer C-Plane Single or Double Side Polish Al<sub>2</sub>O<sub>3</sub> Single Crystal,  MSE Supplies

    MSE PRO 2 inch Sapphire Wafer C-Plane Single or Double Side Polish Al2O3 Single Crystal

    £2500
    3 mm Spherical Premium Yttria Stabilized Zirconia YSZ Milling Media, 1 kg - MSE Supplies LLC

    MSE PRO 3 mm Spherical Premium Yttria Stabilized Zirconia YSZ Milling Media, 1 kg

    £7600
    4 Inch Single Wafer Carrier Case (Pack of 10), Polypropylene, Cleanroom Class 100 Grade,  MSE Supplies

    MSE PRO 4 Inch Single Wafer Carrier Case (Pack of 10), Polypropylene, Cleanroom Class 100 Grade

    £6100