Moorfield MiniLab 026 (Compact Floor Standing Vacuum Evaporator)
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MSE Supplies offers MiniLab 026 (Compact Floor Standing Vacuum Evaporator) from Moorfield. MiniLab 026 tools include a turbomolecular pump positioned on an ISO100 port at the rear of the vacuum chamber. The base of the vacuum chamber sits, as a well, into the supporting frame. The chamber lid can be either a stainless-steel top-hat style lid (i.e., for a ‘clam-shell’ type chamber arrangement), or a bell-jar — similar to the Edwards E306. Systems can be equipped with a wide variety of deposition techniques.
Techniques include thermal and low-temperature evaporation sources (for metals and organics), and magnetron sputtering sources (for metals and inorganics). Deposition sources are typically mounted on the chamber baseplate. Substrate stages are supported from the roof and can accommodate a range of substrate sizes up to 6” diameter. Substrate heating, rotation and Z-shift are available. The MiniLab 026 is also glovebox compatible and is the only system in the MiniLab range that can be easily retrofitted to an existing glovebox. It is suitable for metal, dielectric and organics deposition via evaporation and sputtering techniques.
Country of Origin: Made in UK
Manufacturer: Moorfield Nanotechnology
- Modular design
- 'Clam-shell’ or bell-jar chambers
- Turbomolecular pumping systems
- Base pressures <5×10-7 mba
- Up to 6” diameter substrates
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
- Cleanroom compatible
- Proven performance
- Pumping: Rotary or scroll backing pumps
- Gas/pressure: Manual or automatic control via MFCs and throttle valves
- Stages: Rotation, heating, and Z-shift
- Shutters: Source and substrate, pneumatic or motorized
- Operation: Manual or automatic via front panels, touchscreen HMI or PC
- Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control
Thermal evaporation (metals): Three-source TE3 thermal evaporation component with source shutter and rotation stage. High power TEC-4A power supply and controller with recipe-based automated control. Quartz crystal sensor head with PC software for rate/thickness monitoring.
Thermal evaporation (metals and organics): Two-source TE2 thermal evaporation component for metals and LTE-1CC component for organics. Source shutters and rotation stage. Evaporation power supplies linked to quartz crystal sensor head and Inficon SQC-310 process controller for automated process control per user-defined rates/thicknesses.
Magnetron sputtering: Water-cooled magnetron source for 2″ diameter targets. RF power supply for metals and dielectrics. Source shutter and rotation stage. Recipe-based power vs. time process control.
For accessories and consumables, please contact us so we can help you choose appropriate products for your needs.
About Moorfield: Moorfield was incorporated in 1995. Moorfield are a team of scientists and engineers specializing in the design, manufacture, supply, and support of vacuum deposition (PVD and CVD), etching and annealing systems. The systems manufactured by Moorfield are applied for research, product development and batch production. Applications include semiconductors, photovoltaics, superconductors, sensors, optics, graphene and 2D materials. Academic and industrial markets are served worldwide, both direct and through a network of authorized, trained representatives.
MSE Supplies is an authorized distributor for Moorfield Nanotechnology in the USA.
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