MSE PRO 1-60%RH 1115L Stainless Steel Nitrogen Wafer Stoarge Cabinet
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MSE PRO 1-60%RH 1115L Stainless Steel Nitrogen Wafer Storage Cabinet
Introduction
The MSE PRO 1–60%RH 1115L Stainless Steel Nitrogen Wafer Storage Cabinet is designed for the clean and controlled storage of silicon wafers and wafer boxes in semiconductor manufacturing environments. Constructed from SUS304 stainless steel, the cabinet combines nitrogen protection and FFU filtration to minimize dust contamination and prevent wafer fogging or particle return. A precise LED digital controller maintains stable humidity control, providing a reliable storage solution for sensitive wafer materials.
Key Features
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1–60% RH adjustable humidity control
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1115L storage capacity for wafer boxes and semiconductor components
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SUS304 stainless steel cabinet for cleanroom compatibility and corrosion resistance
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Integrated nitrogen protection system to prevent oxidation and moisture damage
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FFU filtration system for dust control and clean storage environment
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LED digital controller for precise environmental monitoring
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Modular design for easy maintenance and component replacement
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Plug-and-play operation for simple installation
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Suitable for semiconductor fabrication and cleanroom wafer storage
Specification
| SKU | MA0067150 |
| Interior Dimension | W1258 × D627 × H1140 mm |
| Exterior Dimension | W1258 × D627 × H1140 mm |
| Shelf Dimension | W1253 × D600 mm (each) |
| Humidity Range | 1–60% RH Adjustable |
| Volume | 1115 L |
| Net/Gross Weight | 225 kg / 285 kg |
| Recovery Time | 15–20 min (after door open 30s and close) |
| Precision | ±3% RH; Resolution 0.1% RH |
| Shelf | 3 pcs, height adjustable (Max load 80 kg/shelf) |
| Voltage | 110V 60Hz |
Recommended Storage Humidity Guide
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Relative Humidity
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Suggested stored items
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55%~45%RH
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Tapes, CD, lenses, microscope, photograph, oil paintings, stamps, coins, antiques, leather goods, negative, drawings, album ,slides, industrial design, etc
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45%~35%RH
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Optical lenses, precision instruments, camera, lenses, measuring tools, capacitors, batteries, EI, light sources, crystal, PCB, detector, charger, microscopes, endoscopes, electronic appliance, magnetic tape, chemical, tea, coffee, seeds, cigarette etc.
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35%~20%RH
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Samples, filters, precision dies, measurement instruments, pollen, all electronic parts, PCB, wafer, metallic powders, semiconductors, medical supplies etc.
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10%~20%RH
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Electronic components, PCB, crystal, chemical, LED and other complicated electronic components, etc.
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10%-1%RH
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IC, BGA, copper, silver, and materials very sensitive to humidity, etc
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MSE can offer a variety of dry cabinets and nitrogen cabinets. Please contact us if you don't find the size fits your needs.