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MSE PRO 1–60%RH 1115L Semiconductor Wafer Nitrogen Storage Cabinet (Class 10 Cleanroom) - Wafer Carrier Cases - MSE Supplies LLC - MSE Supplies
MSE PRO 1–60%RH 1115L Semiconductor Wafer Nitrogen Storage Cabinet (Class 10 Cleanroom) - Wafer Carrier Cases - MSE Supplies LLC - MSE Supplies
MSE Supplies LLC

MSE PRO 1–60%RH 1115L Semiconductor Wafer Nitrogen Storage Cabinet (Class 10 Cleanroom)

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SKU: MA0067284
$ 24,530.95

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MSE PRO 1–60%RH 1115L Semiconductor Wafer Nitrogen Storage Cabinet (Class 10 Cleanroom)

Introduction

The MSE PRO 1–60%RH 1115L Semiconductor Wafer Nitrogen Storage Cabinet (Class 10 Cleanroom) is designed for the storage of silicon wafers and wafer boxes in semiconductor manufacturing environments. Engineered for cleanroom applications, this cabinet helps prevent particle contamination, moisture damage, and wafer fogging during front-end semiconductor processing. Equipped with a nitrogen purge system and clean filtration module, it maintains a stable low-humidity and ultra-clean environment to protect highly sensitive semiconductor materials.

Constructed from SUS304 stainless steel, the cabinet offers excellent corrosion resistance, structural stability, and long-term durability. A precise LED digital controller ensures accurate humidity monitoring and control, while the modular design allows easy maintenance and component replacement. With Class 10 cleanroom compatibility, this cabinet is ideal for semiconductor fabrication, wafer storage, and microelectronics research environments.

Key Features

  • 1–60%RH adjustable humidity control for flexible wafer storage conditions

  • Class 10 cleanroom compatibility with integrated FFU filtration system to minimize particle contamination

  • Nitrogen purge system to reduce oxidation and maintain ultra-dry conditions

  • Large 1115L storage capacity designed for semiconductor wafer boxes

  • SUS304 stainless steel construction for corrosion resistance and cleanroom durability

  • High-precision LED digital controller for accurate humidity monitoring and stable environmental control

  • Modular design with replaceable controller, nitrogen module, FFU filter, shelves, and casters

  • Plug-and-play operation for easy installation and minimal training

  • RoHS-compliant design with upgradeable modules to reduce environmental impact

  • Long service life (15–20 years) for reliable cleanroom operation in semiconductor facilities

Specification

SKU MA0067284
Interior Dimension 1258(W) × 627(D) × 1140(H) mm
Exterior Dimension 1258(W) × 627(D) × 1140(H) mm
Packing Dimension —
Shelf Dimension 1253 × 600 mm (each shelf)
Humidity Range 1–60%RH adjustable
Volume 1115L
Net/Gross Weight 225 kg / 285 kg
Recovery Time 15–20 minutes to reach setting value after door opening 30 seconds and closing
Precision ±3%RH, ±1.0°C
Shelf 3 pcs (height adjustable)
Voltage 110V 60Hz

 

Recommended Storage Humidity Guide

Relative Humidity
Suggested stored items
55%~45%RH
Tapes, CD, lenses, microscope, photograph, oil paintings, stamps, coins, antiques, leather goods, negative, drawings, album ,slides, industrial design, etc
45%~35%RH
Optical lenses, precision instruments, camera, lenses, measuring tools, capacitors, batteries, EI, light sources, crystal, PCB, detector, charger, microscopes, endoscopes, electronic appliance, magnetic tape, chemical, tea, coffee, seeds, cigarette etc.
35%~20%RH
Samples, filters, precision dies, measurement instruments, pollen, all electronic parts, PCB, wafer, metallic powders, semiconductors, medical supplies etc.
10%~20%RH
Electronic components, PCB, crystal, chemical, LED and other complicated electronic components, etc.
10%-1%RH
IC, BGA, copper, silver, and materials very sensitive to humidity, etc

 

MSE can offer a variety of dry cabinets and nitrogen cabinets. Please contact us if you don't find the size fits your needs. 

The size, voltage, and design are customizable. Please contact us if you have any customization need.
The signal alarm,  buzzer alarm and data logger are available with additional cost.
The product image is for reference only. MSE may upgrade the design without notice.