Gasera One CF4 (Tetrafluoromethane) Gas Analyzer

Gasera One CF4 (Tetrafluoromethane) Gas Analyzer

MSE Supplies is an authorized distributor of Gasera Products in the US. Please fill out the application questionnaire and contact us to discuss the application and configurations.

Introduction

Cleanrooms must be controlled for contamination levels. Accurate, reliable and low maintenance control of cleanroom airborne contamination enables significant yield improvements.

High sensitivity of the GASERA ONE CF4 enables fast response time for detecting contamination of the production environment. Furthermore, the direct absorption measurement provides extremely good long-term stability due to its zero-background nature. The GASERA ONE CF4 can be integrated into a cabinet along with other instrumentation such as particle monitors.

GASERA ONE CF4 analyzer is based on combining ultra sensitive cantilever enhanced photoacoustic detection technology with Quantum Cascade Laser source operating at a Mid-IR fundamental spectral absorption line of CF4. This combination provides enough sensitivity to reliably detect the smallest spills of CF4 without any delay. It also gives an exceptionally high level of stability with a re-calibration period ranging from several
months up to several years, and thus it offers a low total cost of ownership.

Features

• Accurate, reliable and low maintenance control of cleanroom contamination
• selective trace level monitoring of CF4
• Highly selective against aldehydes and other VOCs
• Below 0.1 ppb limit detection
• Response time user configurable from 10 seconds to few minutes
• Wide dynamic range and stable operation
• Requires no consumables
• Low sample volume (few ml)
  
• Recommended re-calibration interval of 12 months
  
• User configurable monitoring tasks
  
• Intuitive user interface
  
• Built-in display presents results both numerically and graphically
• Remote operation via local network

Measurement Performance

• Detection Limit: < 0.1ppb 
• Response Time: dependent on user configurable channel integration time (C.I.T.) and gas exchange routine. From approx. 10 seconds to few minutes depending on averaging time and sampling details.
• Dynamic Range: over 5 orders of magnitude (i.e. 100 000 times the detection limit)
• Repeatability: < 1% of measured value in operational conditions at the calibration concentration.
• Accuracy: Better than 5% at the calibration concentration. Limited by the calibration gas accuracy
• Stability: No drift due to ambient temperature or pressure variations within recommended working conditions

• Form Factor: 19” 3U rack-mount / tabletop unit
• Dimensions: 48.4 × 13.9 × 44 cm (19.1 × 5.5 × 17.3 in)
• Weight: ~13 kg
• Display: Built-in computer with 7” WSVGA screen
• Internal Gas Volume: 30 ml
• Data Storage: ≥ 1 year continuous monitoring

• Temperature: 0°C to +49°C
• Humidity: Non-condensing
• Pressure: 750–1050 mbar
• Dust/water resistance: IP20 (IEC 529)

Sample Gas Conditions:

• Temperature: 0°C to +49°C
• Humidity: Up to 99% RH (non-condensing, temperature dependent)
• Flow Rate: ~1 L/min
• Particle Size: < 1 µm

• Input Voltage: 90–264 VAC, 47–63 Hz
• Power Consumption: Max. 75 W
• Interfaces: Ethernet, USB, optional Serial
• Protocols: MODBUS, AK protocol
• Outputs: Current or voltage signal

• Low Voltage Directive 2014/35/EU
• EMC Directive 2004/108/EC
• RoHS 2 Directive 2011/65/EU

• Airborne molecular contamination (AMC) in semiconductor cleanrooms

Related publications:

Applied Spectroscopy Reviews (2007): Photoacoustic Gas Analysis Using Interferometric Cantilever Microphone

If you are interested in other gas types or multi-gas analyzers, please contact us about your application: 

• Formaldehyde
• Greenhouse gases
• HF, HCl, HCN, SO2, NO2, EtO
• SF6, NOVEC
• CF4, PFCs
• Benzene
• Many more!