MSE PRO Benchtop Precision Contact Measuring Profilometer
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MSE PRO™ Benchtop Precision Contact Measuring Profilometer
MSE PRO™ Profilometer is an ultra-precision contact measurement instrument designed for analyzing surface roughness and microscopic profiles, including micro- and nano-scale step heights and film thicknesses. It features a displacement sensor with sub-angstrom resolution, ultra-low noise signal acquisition, advanced motion control, and high-accuracy calibration algorithms.
With an extremely low contact force, it places minimal demands on surface reflectivity, material type, or hardness, making it highly versatile. As a result, it is widely used for microscopic surface measurements across various industries, including semiconductors and compound semiconductors, high-brightness LEDs, solar energy, MEMS (micro-electromechanical systems), touch screens, automotive components, and medical devices.
MSE Supplies offers various optical metrology instruments. Please contact us for more information.
Specifications:
| SKU | MA2219 |
| Sample Observation (Front View Navigation) |
5MP Colorful Camera FOV: 2.2mm x 1.7mm |
| Sensor | Ultra Low Inertia, LVDC Sensor |
| Measuring Force |
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| Stylus |
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| XY Travel Range | Motorized X/Y (150mm×150mm) Manually adjustable leveling |
| Sample R-θ Stage | Motorized, 0~360° (continuous rotation) |
| Vacuum Chuck | 6-inch vacuum chuck |
| Single Scan Length | 55mm |
| Max Scanning Range | 150 (XY travel) + 55mm scanning range, max range is 8 inches |
| Max Sample Height | 50mm |
| Max Wafer Size | 200mm(8”) |
| Step Height Repeatability* | 5 Å @ Range 330μm/ 10 Å @ Range 1mm (Measure step height 1μm, 1δ) |
| Sensor Range** | 330μm or 1050μm |
| Scanning Speed | 2μm/s~10mm/s |
| Max Scan Sampling Points | 12000 |
| Size(L×W×H) | 640×610×500mm |
| Weight | 40kg |
| Input | AC100~240V, 50/60 Hz, 200W |
| Working environment | Humidity: 30~40% RH(No condensation) Temp.: 16~25°C(Fluctuation < 2°C/h) Ground vibration: 6.35μm /s(1~ 100Hz) Audio noise: ≤80dB Air laminar flow: ≤ 0.508 m/s(Downward flow) |
Note:
* Repeatability data was measured in a laboratory environment that meets VC-C standards and it is equipped with an anti-vibration table. If these conditions are not met, the repeatability data will be doubled.
** The sensor range can only be selected between 330μm and 1050μm. Currently, only the 330μm range probe is magnetic. If there are no features requiring an ultra-large range probe, it is recommended to use the 330μm one.