MSE PRO Fully Automatic Wafer Stage Contact Angle Goniometer
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MSE PRO Fully Automatic Wafer Stage Contact Angle Goniometer
Introduction
The MSE PRO Fully Automatic Wafer Stage Contact Angle Goniometer is a high-end system designed for automated wettability analysis of large-format samples, including semiconductor wafers up to 12 inches. Featuring a fully automated 3D motion stage with 360° rotation and programmable multi-point measurement, it enables precise and repeatable surface characterization across the entire sample.
Equipped with an ultra-high-resolution imaging system and a software-controlled micro-injection module (0.01 μL accuracy), the system supports advanced analysis including static and dynamic contact angle, surface free energy, and interfacial tension. Its one-click automated workflow allows for high-throughput testing, generating over 100 data points on a single wafer, making it ideal for semiconductor manufacturing, coatings, and advanced materials research.
Key Features
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Fully automated 3D wafer stage with 360° rotation (0.01° precision)
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Supports up to 12-inch wafer measurement
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Programmable multi-point testing (>100 data points per wafer)
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High-precision dosing system (0.01 μL, software-controlled)
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Ultra-high-resolution imaging (5120 × 3840)
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High-speed imaging up to 300 fps (upgradeable)
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One-click automated measurement and analysis
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Advanced surface energy and interfacial tension analysis
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Designed for high-throughput and high-repeatability applications
Specification
| 1. General | |
| Model | MSE PRO Fully Automatic Wafer Stage Contact Angle Goniometer |
| Dimensions | 900 × 550 × 730 mm |
| Weight | 30 kg |
| Power Supply | 110V |
| Power Consumption | 150 W |
| Frequency | 60Hz |
| 2. Sample Stage | |
| Stage Size | 12 inch wafer platform |
| Max Sample Size | 12 inch × 15 mm |
| Stage Type | Fully Automatic 3D Stage |
| X/Y Travel | 160 mm (±0.1 mm) |
| Rotation | 360° continuous |
| Rotation Accuracy | 0.01° |
| 3. Imaging System | |
| Resolution | 5120 × 3840 |
| Max Frame Rate | 300 fps (Upgradeable) |
| Sensor | SONY 1/1.8" |
| Imaging Mode | Color / Monochrome |
| Exposure | Adjustable |
| Interface | USB3 Vision |
| Power | 5V DC USB |
| 4. Optical System | |
| Focal Length | 200 mm ± 5 mm (Zoom Adjustable) |
| Magnification | 10× |
| Angle Adjustment | ±10° |
| Resolution Scale | 4–14 μm |
| Viewing Modes | Top / Bottom / Side View Adjustable |
| 5. Illumination | |
| Light Type | Industrial LED (Cold Light) |
| Wavelength | 470 nm |
| Light Field | Φ50 mm |
| LED Array | 96-point |
| Lifetime | 50,000 hours |
| 6. Injection System | |
| Injection Type | Precision Micro-Injection Pump |
| Control | Software Digital Control |
| Accuracy | 0.01 μL |
| Speed | 1–2000 μL/min |
| Syringe Volume | 100 / 500 / 1000 μL (500 μL standard) |
| Needle | 0.51 mm Hydrophobic Stainless Steel |
| Liquid Handling | Motorized contact detection |
| 7. Measurement & Analysis | |
| Contact Angle Range | 0–180° |
| Resolution | 0.01° |
| Measurement Modes | Fully Auto / Semi-auto / Manual |
| Multi-Point Testing | Programmable automatic measurement |
| Data Output | >100 data points per 12-inch wafer |
| Methods | Static, Dynamic, Advancing/Receding |
| Models | Young-Laplace, Circle, Ellipse, Tangent |
| Analysis Methods | Sessile drop, pendant drop, bubble method |
| 8. Interfacial Tension | |
| Range | 0–3000 mN/m |
| Resolution | 0.01 mN/m |
| Methods | Pendant drop, bubble method |
| 9. Surface Free Energy | |
| Models | Zisman, OWRK, Wu, Fowkes, Antonow, EOS |
| Outputs | Adhesion work, spreading coefficient |
| 10. Data Processing | |
| Output | Fully automatic report generation |
| Formats | Excel, Word, Graphs |
| Data Visualization | 2D mapping of wafer surface |
| MES Integration | Supported |
MSE offers a range of contact angle goniometer models. Please contact us for more information.