MSE PRO Yttrium Oxide Sputtering Target Y2O3
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Specifications for Yttrium Oxide Sputtering Target
| Material Type | Yttrium Oxide |
| Symbol | Y2O3 |
| Color/Appearance | White, Crystalline Solid |
| Melting Point (°C) | 2,410 |
| Theoretical Density (g/cc) | 5.01 |
| Z Ratio | **1.00 |
| Sputter | RF, RF-R |
| Max Power Density (Watts/Square Inch) |
20* |
| Type of Bond | Indium, Elastomer |
| Comments | Loses oxygen; films smooth and clear. |