MSE PRO Indium Tin Oxide Sputtering Target ITO
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Specifications for Indium Tin Oxide (ITO) Sputtering Target
To add a Cu Backing Plate with Indium Bonding for Sputtering Targets 
Indium Tin Oxide Sputtering Targets ITO Features and Specifications
- Chemical Composition: In2O3 • SnO2 (90:10 wt%,)
- Color: Black
- Purity: > 99.99%
- Relative density: more than 99.2%
- Resistance: 1 x 10-4 Oh-cm
- Coefficient of Thermal Expansion (CTE): 8 x 10-6 / K
- Sputter: RF, DC
- Max power density: 20 Watts per square inch
- Bonding available: indium bonding to oxygen free copper backing plate