Oxide Ceramic Sputtering Targets - MSE Supplies

Oxide Ceramic Sputtering Targets

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Oxide Ceramic Target Materials for Sputtering or Laser Ablation - The Most Comprehensive Supply of Oxide Ceramic Targets
Aluminum  Oxide (Al2O3) Lead Zirconate Titanate (Pb[Zr(x)Ti(1-x)]O3) (PZT)
Antimony : Tin Dioxide (Sb:SnO2) (ATO) Lead  Zirconate (PbZrO3)
Antimony  Oxide (Sb2O3) Li3PO4
Barium Bismuth Oxide (BaBiO3) Li4Ti5O12
Barium Calcium Titanate (BaCaxTi(1-x)O3) LiFePO4
Barium Cobalt Oxide (BaCuO2) LiMn2O3
Barium Copper Oxide (BaCoO3) LiNiCoMnO2
Barium Ferrite (BaFe12O19) Lithium Titanate (Li4Ti5O12)
Barium Lead Oxide (BaPbO3) Lutetium Oxide (Lu2O3)
Barium Manganese Oxide (BaMnO3) Magnesium Oxide (MgO)
Barium Strontium Titanate (BaxSr(1-x)TiO3), BST Molybdenum Oxide (MoO)
Barium Tin Oxide (BaSnO3) Molybdenum Oxide (MoO3)
Barium Titanate (BaTiO3) Nd(0.67)Ba(0.33)Mn(1)O(3) (NBMO)
Barium Zirconate (BaZrO3) Nd2CuO4
Barium Zirconium Titanate (BaZrxTi(1-x)O3) NdBa2Cu3O7
Bismuth Ferrite (BiFeO3) Neodymium Oxide (Nd2O3)
Bismuth Ferrite, Chromium Doped (BiFexCr1-xO3) (Cr : BFO) Nickel Ferrite (NiFe2O4)
Bismuth Ferrite, Samarium Doped (BixSm(1-x)O3) (Sm : BFO) Nickel Oxide (NiO)
Bismuth Oxide (Bi2O3) Praseodymium Oxide (Pr6O11)
Calcium Copper Oxide (CaCuO2) PrBa2Cu3O7 (PBCO)
Calcium Manganese Oxide (CaMnO2) PrCoO3
Calcium Titanate (CaTiO3) PrxCa(1-x)MnO3 (PCMO)
Cerium fluoride (CeF3) Samarium Oxide(Sm2O3)
Cerium oxide (CeO2) Scandium Oxide (Sc2O3)
Chromium Oxide (Cr2O3) ScMnO3
Cobalt Ferrite (CoFe2O4) Silica Doped Zirconia (ZrO2 + SiO2)
Copper Oxide (CuO) Silicon Dioxide(SiO2)
Dysprosium Oxide (Dy2O3) Silicon Monoxide(SiO)
ErBa2Cu3O7 (EBCO) SmBa2Cu3O7 (SBCO)
Erbium Cobalt Oxide (ErCoO3) SmBa2Cu3O7 (SBCO)
Erbium Oxide(Er2O3) SmScO3
Europium Oxide (Eu2O3) SrCoO3
Ga2O3 doped ZnO (GZO) SrCuO2
GaBa2Cu3O7 (GBCO) SrFe12O19
Gadolinium Oxide (Gd2O3) SrMnO3
Gd2Zr2O7 (GZO) SrRuO3
GdCrO3 (GCO) Strontium Titanate (SrTiO3)
GdScO3 (GSO) Strontium Zirconate (SrZrO3)
Hafnium Oxide  (HfO2 ) Tantalum Pentoxide (Ta2O5)
Holmium Oxide (Ho2O3) Terbium Oxide (Tb4O7)
Indium Gallium Zinc Oxide (IGZO) Thulium Oxide (Tm2O3)
Indium Oxide (In2O3) Titanium Dioxide (TiO2)
Indium Tin Oxide (ITO) Titanium Monoxide (TiO)
Indium Zinc Oxide (IZO) Titanium Oxide (Ti2O3)
Indium Zinc Oxide (IZO, 90 wt% In2O3 / 10 wt% ZnO) Titanium Oxide (Ti3O5)
Iron Oxide (Fe2O3) Tungsten Oxide (WO2.9)
Iron Oxide (Fe3O4) Tungsten Oxide (WO3)
La0.67Ba0.33MnO3 (LBMO) Vanadium Pentoxide (V2O5)
La0.67Sr0.33MnO3 (LSMO) Y3Fe5O12
Lanthanum Aluminate(LaAl2O3) YAlO3
LaSrNiO3 (LSNO) YbMnO3
LaxBa(1-x)CoO3 (LBCO) YMnO3
LaxCa(1-x)CoO3 (LCCO) Ytterbium Oxide (Yb2O3)
LaxCa(1-x)MnO3 (LCMO) Yttrium Barium Copper Oxide (YBCO, YBa2Cu3O7)
LaxSr(1-x)CoO3 (LSCO) Yttrium oxide(Y2O3)
LaxSr(1-x)FeO3 (LSFO) Zinc oxide (ZnO)
LaxSr(1-x)MnO3 (LSMO) Zinc Oxide, Aluminum Doped (AZO)
LaxSr(1-x)TiO3 (LSTO) Zirconium oxide (ZrO2)
LaxSr(2-x)CuO4 (LSCO) ZnS
Lead Oxide (PbO) ZrO2 Doped with Titanium (Ti-ZrO2)
Lead Titanate (PbTiO3) ZrO2 -Y2O3 Stabilized (YSZ)
Lead Zirconate (PbZrO3)  


  • MSE Supplies can customize ceramic targets with specific chemical compositions and geometric sizes. 
  • Sizes and shapes: a comprehensive range of sizes are available to accommodate the requirements of most popular deposition tools.
  • Typical sizes: 1" or 2" diameter or larger (maximum diameter 500 mm)
  • Typical Purity: 99%, 99.9%, 99.95%, 99.99%, or higher purity
  • Applications: physical vapor deposition (PVD) of thin films, laser ablation deposition (PLD), magnetron sputtering for semiconductor, display, LED and photovoltaic devices.
  • Each target can be designed to fit customer specified backing plates or cups with either indium/tin or silver epoxy bonding.
  • Bonding service is available on oxygen free copper backing plate.
  • For product quotation, please email:
  • For technical questions:



Our ceramic processing and fabrication facilities are equipped with state-of-the-art processing equipment such as hot press and CNC machine as well as advanced analytical and test equipment.  Our engineers monitor and verify the quality specifications before shipping each product to our customers. 

hot press for custom ceramic targets for sputtering or laser ablation by msesupplies       hot press for custom ceramic targets, sputtering or laser ablation, by msesupplies


  • Glow Discharge Mass Spectroscopy (GDMS)
  • Atomic Emission Spectroscopy (AES)
  • Atomic Absorption Spectroscopy (AAS)
  • Scanning Electron Microscopy (SEM)
  • X-ray Diffraction (XRD)
  • C-SCAN Nondestructive Testing
  • Wet Chemistry

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