{"product_id":"mse-pro-microwave-plasma-cleaner","title":"MSE PRO Microwave Plasma Cleaner","description":"\u003ch3 data-mce-fragment=\"1\"\u003eMSE PRO™ Microwave Plasma Cleaner\u003c\/h3\u003e\n\u003cp data-mce-fragment=\"1\"\u003e\u003cmeta charset=\"utf-8\"\u003e\u003cstrong data-mce-fragment=\"1\"\u003eMSE Supplies\u003c\/strong\u003e\u003cspan data-mce-fragment=\"1\"\u003e \u003c\/span\u003eoffers Microwave Plasma Cleaner. \u003cmeta charset=\"utf-8\"\u003eMicrowave plasma cleaning and ashing (descumming) process is an advanced dry process using common industrial gases as raw materials, such as oxygen, nitrogen, argon, carbon tetrafluoride and many other gases. This process is rather environmentally friendly and efficient in cleaning; therefore, it has been promoted by more and more industry users. Our system can accommodate wafers up to 8 inch in diameter. It is suitable for wafer dry ashing or wafer surface activation and other batch processes. It is widely used in surface treatment related applications like automobiles, batteries, biomaterials, etc. \u003c\/p\u003e\n\u003cp data-mce-fragment=\"1\"\u003e\u003cstrong\u003eApplications: \u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eBatch wafer surface activation\u003c\/li\u003e\n\u003cli\u003eBatch wafer photoresist removal \u003c\/li\u003e\n\u003cli\u003eRemoval of MEMS sacrificial layers \u003c\/li\u003e\n\u003cli\u003eDESCUM process\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch2 data-mce-fragment=\"1\"\u003e\n\u003cb data-mce-fragment=\"1\"\u003e\u003c\/b\u003eTechnical Specifications\u003c\/h2\u003e\n\u003ctable style=\"font-weight: 400; width: 565px;\" data-mce-style=\"font-weight: 400; width: 565px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003e\n\u003cmeta charset=\"utf-8\"\u003e \u003cspan\u003eDimension (W x D x H)\u003c\/span\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003e900mm x 900mm x 750mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003eWeight\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003e~200kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003eChamber Material\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003eQuartz chamber\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003eChamber Dimension (\u003cspan data-mce-fragment=\"1\"\u003eφ x D\u003c\/span\u003e)\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003e150mm x 260mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003e\u003cspan\u003ePower\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003e110V\/60Hz\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003eMicrowave Source\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003e2.45GHz microwave, 1250W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003eProcess Gas Line\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003eMFC control (standard: 2 channels), customizable\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003eFlow Rate\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003e100SCCM (O\u003csub\u003e2\u003c\/sub\u003e\/Ar)\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20px;\" data-mce-style=\"height: 20px;\"\u003e\n\u003ctd style=\"width: 191.352px; height: 20px;\" data-mce-style=\"width: 191.352px; height: 20px;\"\u003eVacuum Level\u003c\/td\u003e\n\u003ctd style=\"width: 351.648px; height: 20px;\" data-mce-style=\"width: 351.648px; height: 20px;\"\u003e30-90Pa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp data-mce-fragment=\"1\"\u003e*Vacuum pump and water chiller NOT included. Please \u003cstrong data-mce-fragment=\"1\"\u003e\u003ca data-mce-fragment=\"1\" href=\"https:\/\/www.msesupplies.com\/pages\/contact-us\" data-mce-href=\"https:\/\/www.msesupplies.com\/pages\/contact-us\" target=\"_blank\"\u003e\u003cem data-mce-fragment=\"1\" style=\"font-weight: bold;\" data-mce-style=\"font-weight: bold;\"\u003econtact us\u003c\/em\u003e\u003c\/a\u003e\u003c\/strong\u003e for detailed specification and optional items.\u003c\/p\u003e","brand":"MSE Supplies LLC","offers":[{"title":"Default Title","offer_id":40173677445178,"sku":"MA2126","price":79672.95,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7785\/files\/MA2126-2.png?v=1703692420","url":"https:\/\/www.msesupplies.com\/products\/mse-pro-microwave-plasma-cleaner","provider":"MSE Supplies","version":"1.0","type":"link"}