MSE PROKLA iNano Nanoindenter for Nanoscale Mechanical Testing

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MSE PRO™ provides the best value for KLA instruments.

The iNano nanoindenter makes measuring thin films, coatings and small volumes of material easy. The accurate, flexible, user-friendly instrument can perform a wide range of nanoscale mechanical tests including indentation, hardness, scratch and universal nanoscale testing. The large dynamic range of force and displacement measurements allows materials from soft polymers to metals to be tested with accuracy and repeatability. Modular options can accommodate a variety of applications: material property maps, frequency-specific testing, scratch and wear testing and high-temperature testing. The iNano nanoindenter has a complete suite of options to expand testing, including sample heating, continuous stiffness measurement, NanoBlitz 3D/4D property mapping and the remote video option.

The iNano nanoindenter features the InForce 50 actuator for performing nanoindentation and universal nanomechanical tests. The 50mN force and 50µm displacement range of the InForce 50 allow the system to perform a wide range of tests. The InView software is a flexible, modern software package that makes nanoscale testing easy. The iNano is a compact platform with the high-speed InQuest controller and vibration isolation gantry built into the enclosure. An extensive range of materials and devices can be tested, including metals, ceramics, composites, thin films, coatings, polymers, biomaterials and gels.


  • Hardness and modulus measurements
  • High speed material property maps
  • ISO 14577 hardness testing 
  • Polymer tan delta, storage and loss modulus
  • High temperature nanoindentation testing


  • Universities, research labs and institutes
  • Semiconductor and packaging industries
  • Polymers and plastics 
  • MEMS: Micro-electro-mechanical systems
  • Nanoscale universal testing
  • Ceramics and glass
  • Metals and alloys 
  • Pharmaceuticals 
  • Coatings and paints 
  • Polymer manufacturing 
  • Composites
  • Batteries and energy storage

MSE Supplies is an authorized distributor of KLA instruments.

KLA develops industry-leading equipment and services that enable innovation throughout the electronics industry. We provide advanced process control and process-enabling solutions for manufacturing wafers and reticles, integrated circuits, packaging, printed circuit boards and flat panel displays. In close collaboration with leading customers across the globe, our expert teams of physicists, engineers, data scientists and problem-solvers design solutions that move the world forward.