{"product_id":"mse-pro-4-inch-titanium-ti-thin-film-on-silicon-wafer","title":"MSE PRO 4 inch Titanium (Ti) Thin Film on Silicon Wafer","description":"\u003ch2\u003eMSE PRO™ 4 inch Titanium (Ti) Thin Film on Silicon Wafer\u003c\/h2\u003e\n\u003cp\u003e\u003cspan\u003eTitanium (Ti), due to its interesting properties such as high mechanical strength, excellent thermal stability, good corrosion resistance in extreme conditions and intrinsic biocompatibility is a potential candidate used as bulk or coatings in biomedical, aerospace and other industrial applications. Furthermore, titanium coatings are employed for microelectronics applications in very large scale integration (VLSI) technology and microelectromechanical system (MEMS) based devices. \u003c\/span\u003e\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eSpecifications:\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable style=\"width: 562px; height: 197.017px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 19.6023px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 19.6023px;\"\u003eSize\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 19.6023px;\"\u003e4 inch\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 20.5966px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 20.5966px;\"\u003eSubstrate\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 20.5966px;\"\u003eSilicon wafer\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6023px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 19.6023px;\"\u003eSubstrate Doping Type\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 19.6023px;\"\u003eP-type\/ Boron-doped\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6023px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 19.6023px;\"\u003eSubstrate Orientation\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 19.6023px;\"\u003e\u0026lt;100\u0026gt;\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6023px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 19.6023px;\"\u003eSubstrate Resistivity\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 19.6023px;\"\u003e1-100 ohm-cm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6023px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 19.6023px;\"\u003eDeposition Method\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 19.6023px;\"\u003ePVD\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6023px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 19.6023px;\"\u003eSubstrate Surface\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 19.6023px;\"\u003eSingle Side Polished\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6023px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 19.6023px;\"\u003eThin Film Material\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 19.6023px;\"\u003eTitanium (Ti)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6023px;\"\u003e\n\u003ctd style=\"width: 248.992px; height: 19.6023px;\"\u003eThin Film Thickness\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px; height: 19.6023px;\"\u003e50 nm - 300nm customizable\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003eReference:\u003c\/h3\u003e\n\u003cp\u003e[1] \u003ca rel=\"noopener\" href=\"https:\/\/doi.org\/10.1016\/j.msea.2006.06.020\" target=\"_blank\"\u003eY.L. Jeyachandran, B. Karunagaran, Sa.K. Narayandass, D. Mangalaraj, T.E. Jenkins, P.J. Martin, Properties of titanium thin films deposited by dc magnetron sputtering, Materials Science and Engineering: A, Volume 431, Issues 1–2, 2006, Pages 277-284.\u003c\/a\u003e\u003cbr\u003e\u003cspan data-mce-fragment=\"1\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003e[2] \u003ca href=\"https:\/\/doi.org\/10.1016\/j.apsusc.2005.01.013\" rel=\"noopener\" target=\"_blank\"\u003eKaiyong Cai, Michael Müller, Jörg Bossert, Annett Rechtenbach, Klaus D. Jandt, Surface structure and composition of flat titanium thin films as a function of film thickness and evaporation rate, Applied Surface Science, Volume 250, Issues 1–4, 2005, Pages 252-267.\u003c\/a\u003e\u003c\/p\u003e","brand":"MSE Supplies","offers":[{"title":"50nm","offer_id":40293249056826,"sku":"WA5310","price":296.95,"currency_code":"USD","in_stock":true},{"title":"150nm","offer_id":40293249089594,"sku":"WA5311","price":296.95,"currency_code":"USD","in_stock":true},{"title":"300nm","offer_id":40293249122362,"sku":"WA5312","price":296.95,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7785\/files\/mse-pro-4-inch-titanium-ti-thin-film-on-silicon-wafer-50nm-mse-supplies-llc-wafers-22036494057530.png?v=1752499225","url":"https:\/\/www.msesupplies.com\/en-gb\/products\/mse-pro-4-inch-titanium-ti-thin-film-on-silicon-wafer","provider":"MSE Supplies","version":"1.0","type":"link"}