{"product_id":"mse-pro-4-inch-tantalum-nitride-tan-thin-film-on-silicon-wafer","title":"MSE PRO 4 inch Tantalum Nitride (TaN) Thin Film on Silicon Wafer","description":"\u003ch2\u003eMSE PRO™ 4 inch Tantalum Nitride Thin Film on Silicon Wafer\u003c\/h2\u003e\n\u003cp\u003e\u003cspan\u003eTantalum (Ta) and Tantalum nitride (TaN) have been extensively used for microelectronic industry, as diffusion barriers and thin film resistors. Both materials have potential as coatings for tribological and corrosion resistance applications. TaN is very well known for its high wear resistance, high hardness and remarkable corrosion resistance. It has been used as protective coating in industry and also as diffusion barrier.\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eSpecifications:\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable style=\"width: 562px;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eSize\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003e4 inch\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eSubstrate\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003eSilicon wafer\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eSubstrate Thickness\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003e\u003cspan\u003e775 um +\/- 25um\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eSubstrate Doping Type\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003eP-type\/ Boron-doped\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eSubstrate Orientation\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003e\u0026lt;100\u0026gt;\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eSubstrate Resistivity\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003e1-100 ohm-cm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eDeposition Method\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003ePVD\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eSubstrate Surface\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003eSingle Side Polished\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eThin Film Material\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003eTantalum Nitride (TaN)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 248.992px;\"\u003eThin Film Thickness\u003c\/td\u003e\n\u003ctd style=\"width: 294.008px;\"\u003e50 nm - 300nm customizable\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003eReference:\u003c\/h3\u003e\n\u003cp\u003e[1] \u003ca href=\"https:\/\/doi.org\/10.1016\/j.surfcoat.2016.10.067\" target=\"_blank\"\u003eA. Jara, B. Fraisse, V. Flaud, N. Fréty, G. Gonzalez, Thin film deposition of Ta, TaN and Ta\/TaN bi-layer on Ti and SS316-LVM substrates by RF sputtering, Surface and Coatings Technology, Volume 309, 2017, Pages 887-896.\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e[2] \u003ca rel=\"noopener noreferrer\" href=\"https:\/\/doi.org\/10.1116\/1.1520556\" target=\"_blank\"\u003e\u003cspan data-mce-fragment=\"1\"\u003eS. M. Rossnagel; Characteristics of ultrathin Ta and TaN films. \u003c\/span\u003e\u003cem data-mce-fragment=\"1\"\u003eJ. Vac. Sci. Technol. B\u003c\/em\u003e\u003c\/a\u003e\u003cspan data-mce-fragment=\"1\"\u003e\u003ca rel=\"noopener noreferrer\" href=\"https:\/\/doi.org\/10.1116\/1.1520556\" target=\"_blank\"\u003e 1 November 2002; 20 (6): 2328–2336.\u003c\/a\u003e \u003c\/span\u003e\u003c\/p\u003e","brand":"MSE Supplies","offers":[{"title":"50nm","offer_id":40292102307898,"sku":"WA5307","price":296.95,"currency_code":"USD","in_stock":true},{"title":"150nm","offer_id":40292102340666,"sku":"WA5308","price":296.95,"currency_code":"USD","in_stock":true},{"title":"300nm","offer_id":40292102373434,"sku":"WA5309","price":296.95,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7785\/files\/mse-pro-4-inch-tantalum-nitride-tan-thin-film-on-silicon-wafer-50nm-mse-supplies-llc-wafers-22036493893690.png?v=1752500202","url":"https:\/\/www.msesupplies.com\/en-gb\/products\/mse-pro-4-inch-tantalum-nitride-tan-thin-film-on-silicon-wafer","provider":"MSE Supplies","version":"1.0","type":"link"}