{"product_id":"mse-pro-4-inch-aluminum-copper-al-cu-thin-film-on-silicon-wafer","title":"MSE PRO 4 inch Aluminum-Copper (Al-Cu) Thin Film on Silicon Wafer","description":"\u003ch2\u003eMSE PRO™ 4 inch Aluminum-Copper (Al-Cu) Thin Film on Silicon Wafer\u003c\/h2\u003e\n\u003cp\u003eAluminum-copper (Al-Cu) alloys have become a popular choice for interconnects in integrated circuits due to their excellent conductivity and processing capabilities. Al-Cu thin films are renowned for their exceptional thermal stability, superior conductivity, and minimal resistivity.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eSpecifications:\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable style=\"width: 562px; height: 190px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eSize\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003e4 inch\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eSubstrate\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003eSilicon wafer\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eSubstrate Thickness\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003e\u003cspan\u003e775 um +\/- 25um\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eSubstrate Doping Type\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003eP-type\/ Boron-doped\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eSubstrate Orientation\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003e\u0026lt;100\u0026gt;\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eSubstrate Resistivity\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003e1-100 ohm-cm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eDeposition Method\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003ePVD\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eSubstrate Surface\u003cbr\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003eSingle Side Polished\u003cbr\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eThin Film Material\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003eAluminum-Copper (Al-Cu)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19px;\"\u003e\n\u003ctd style=\"width: 250.866px; height: 19px;\"\u003eThin Film Thickness\u003c\/td\u003e\n\u003ctd style=\"width: 296.236px; height: 19px;\"\u003e50 nm - 1500 nm customizable\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003eReference:\u003c\/h3\u003e\n\u003cp\u003e[1] \u003ca rel=\"noopener\" href=\"https:\/\/d1wqtxts1xzle7.cloudfront.net\/99797200\/s1359-6454_2801_2900048-920230313-1-1k21xcw-libre.pdf?1678723038=\u0026amp;response-content-disposition=inline%3B+filename%3DPhase_transformations_in_Al_Cu_thin_film.pdf\u0026amp;Expires=1710271004\u0026amp;Signature=Irap6~-l1K3tge7uztCIypT66Nt58fll9noa5pCBsmcHSDU5IdfC0H1uiU6fmuYOMsaWpjWXKuv2uLk2~AWTmQ~disswQDdxo~MAfY2bXtat2bnkVIn2rr0kJPcJjjSVosAV8SAAyk3SGauHuP6Qw7K~QzegSiNj7ecPnTVPb3kWyfRUkKpcUS4tIh8K~HRqEAaMLCcyyLx6FaTNmL39T3HyZSS32pCHlhogkTCjfl-jrAGl7vCOzWn8tW4jjlOI51rrFkgYbTp1FzBY6OgOKK6-wRNPFJjQtHNioJn-Vyli0Kgm8lv4CEjBrVcAA1U6s2yDM3S3AwB8OgPV6Uvoig__\u0026amp;Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA\" target=\"_blank\"\u003eJ.P. Lokker, A.J. Bottger, W.G. Sloof, et al. Phase transformations in Al-Cu Thin films: precipitation and copper redistribution, Acta meter, 49 (2001) 1339-1349.\u003c\/a\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e[2] \u003ca href=\"https:\/\/doi.org\/10.1016\/j.surfcoat.2012.01.065\" rel=\"noopener\" target=\"_blank\"\u003eFanta Haidara, Marie-Christine Record, Benjamin Duployer, Dominique Mangelinck, Investigation of reactive phase formation in the Al–Cu thin film systems, Surface and Coatings Technology, Volume 206, Issues 19–20, 2012, Pages 3851-3856.\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e[3] \u003ca href=\"https:\/\/doi.org\/10.1016\/j.jcrysgro.2019.125418\" rel=\"noopener\" target=\"_blank\"\u003eTatu Pinomaa, Joseph M. McKeown, Jörg M.K. Wiezorek, Nikolas Provatas, Anssi Laukkanen, Tomi Suhonen, Phase field modeling of rapid resolidification of Al-Cu thin films, Journal of Crystal Growth, Volume 532, 2020, 125418.\u003c\/a\u003e\u003c\/p\u003e","brand":"MSE Supplies","offers":[{"title":"50nm","offer_id":40302893170746,"sku":"WA5336","price":296.95,"currency_code":"USD","in_stock":true},{"title":"500nm","offer_id":40302893203514,"sku":"WA5337","price":296.95,"currency_code":"USD","in_stock":true},{"title":"1um","offer_id":40302893236282,"sku":"WA5338","price":296.95,"currency_code":"USD","in_stock":true},{"title":"1.5um","offer_id":40302893269050,"sku":"WA5339","price":296.95,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7785\/files\/mse-pro-4-inch-aluminum-copper-al-cu-thin-film-on-silicon-wafer-50nm-mse-supplies-llc-wafers-21992073461818.png?v=1752501173","url":"https:\/\/www.msesupplies.com\/en-gb\/products\/mse-pro-4-inch-aluminum-copper-al-cu-thin-film-on-silicon-wafer","provider":"MSE Supplies","version":"1.0","type":"link"}