3N5 (99.95%) Ruthenium (Ru) Pieces (3-12mm) Evaporation Materials
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Ruthenium (Ru) is an inert rare transition metal. Most ruthenium produced is used in wear-resistant electrical contacts, thick-film resistors, platinum alloys and chemistry catalyst. A new application of ruthenium is as the optical layer for extreme ultraviolet photomasks.
The dimensions and purities can be customized upon request. Please contact us for customization or bulk orders.
|Molecule Weight (g/mol)||101.07|
|Color/Appearance||Silvery White Metallic|
|Thermal Conductivity (W/m.K)||120|
|Melting Point (°C)||2,310|
|Coefficient of Thermal Expansion (/K)||6.4 x 10-6|
|Theoretical Density (g/cm3)||12.3|
|Temp. (°C) for Given Vap. Press. (Torr)||
MSE Supplies offers a variety of crucibles for evaporation materials. We can customize the dimensions based on your requirements.
1. Atomic layer deposition of ruthenium surface-coating on porous platinum catalysts for high-performance direct ethanol solid oxide fuel cells. Journal of Power Sources 291 (2015): 239-245.
2. Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasks. In Extreme Ultraviolet (EUV) Lithography VII, vol. 9776, pp. 364-373. SPIE, 2016.
3. Reflectance and optical constants of evaporated ruthenium in the vacuum ultraviolet from 300 to 2000 Å. JOSA 64, no. 4 (1974): 423-428.
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