{"product_id":"mse-pro-magnetically-levitated-pump-water-cooling-on-board-highest-pump-speed","title":"MSE PRO Magnetically Levitated Pump, Water Cooling on Board, Highest Pump Speed","description":"\u003ch2\u003e\u003cspan\u003eMSE PRO™ Magnetically Levitated Pump, Water Cooling on Board, Highest Pump Speed\u003c\/span\u003e\u003c\/h2\u003e\n\u003cp\u003e\u003cstrong\u003eProduct Details:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cspan\u003eThe magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cspan\u003eSeries magnetically levitated molecular pumps are vacuum generation equipment offered by MSE Supplies for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eTechnologies:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cb\u003eControl Technology for Magnetic Bearing: \u003c\/b\u003eThe adopted electromagnetic is a 5-axis magnetically levitated. This design can have dynamic response and timely adjustment by means of dynamic active closed-circuit magnetic suspension control technology based on advanced international control theory, so as to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cb\u003eMotor Drive Control Technology:\u003c\/b\u003e High-efficiency high-speed DC motor and servo control system are applied to series magnetically levitated pumps, so to have maximum energy of the motor and to compensate the rotating speed of shafting automatically, thereby realizing stable start-up, reliable operation and automatic regulating function of dynamic energy.\u003c\/li\u003e\n\u003cli\u003e\n\u003cb\u003eCarbon fiber composite rotor technology: \u003c\/b\u003eThe turbo rotors of serial magnetic suspension molecular pumps are made by compounding high-strength aluminum alloy and light-weight carbon fiber. In comparison with all aluminum alloy rotors, the turbo rotors are characterized of great reduction of weight and great improvement of strength, so that targets of high rotating speed, high performance and high reliability are achieved.\u003c\/li\u003e\n\u003cli\u003e\n\u003cb\u003eCorrosion resisting technology: \u003c\/b\u003eSurfaces of parts in chambers of serial magnetic suspension molecular pumps are treated with special process, so that the surfaces can resist corrosion caused by corrosive gases in semiconductor manufacturing processes for a long time. In addition, such inert gases as N2 are fully filled in shafting of the pumps to protect the low vacuum parts in the pumps, so that function of stably exhausting corrosive gases for long periods is realized.\u003c\/li\u003e\n\u003cli\u003e\n\u003cb\u003eHeating temperature control system: \u003c\/b\u003eSeries magnetically levitated molecular pumps are equipped with an electric heater and a temperature controller, so that cooling water, air-bone heating, electric heating and heat carried by protective gases can be monitored and controlled during operation, temperature in the pumps can be maintained at some value for long term, some gaseous substances are not converted into solid substances at normal temperature and not deposited in the pumps, and requirements for special process such of etching can be met.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eAdvantages:\u003c\/strong\u003e\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003e\n\u003cspan\u003eZero friction during operation, and low power consumption\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e3. Capable of extracting corrosive gases for long term\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e4. High safety and long service life due to protection of bearings with precision ceramic balls\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e5. power generating function in case of sudden power-off\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e6. Free of friction\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e7. Free of pollution\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e8. Free of maintenance\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e9. Low vibration\u003c\/span\u003e\u003cbr\u003e\u003cspan\u003e10. installed in any orientation.\u003c\/span\u003e\u003cspan\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003e\u003cstrong\u003eApplications:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cspan\u003eSeries magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSpecification:\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable width=\"100%\" style=\"width: 100.364%; height: 376.735px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 3px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003ePump Speed(l\/s,Air)\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003e3200\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 71.5938px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eCompression Ratio\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003e\u0026gt;1×10\u003csup\u003e8\u003c\/sup\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 40px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eUltimate Vacuum(Pa)\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003e≤5×10\u003csup\u003e-7\u003c\/sup\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 51.1875px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eInlet Flange\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003eISO-F 320\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 25.5938px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eOutlet Flange\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003eKF 40\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 25.5938px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eRotation Speed(rpm)\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003e24000\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 38.3906px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eRun-up Time(min)\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003e12\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 0px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eVIB (mm)\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003e\u0026lt;0.05\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 76.1875px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eBacking Pump (L\/s)\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003e15\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 25.5938px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eMounting or ientation\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003eAny\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.5938px;\"\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eCooling method\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003eWater\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 52.381%;\"\u003eWeight(kg) (With Controller)\u003c\/td\u003e\n\u003ctd width=\"182\" valign=\"center\" style=\"width: 47.2527%;\"\u003e75\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cp\u003e \u003c\/p\u003e","brand":"MSE Supplies","offers":[{"title":"Default Title","offer_id":40800482820154,"sku":"VP1008","price":30935.95,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7785\/files\/CXF3203001.png?v=1741292485","url":"https:\/\/www.msesupplies.com\/en-de\/products\/mse-pro-magnetically-levitated-pump-water-cooling-on-board-highest-pump-speed","provider":"MSE Supplies","version":"1.0","type":"link"}