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6 Inch Lithium Tantalate Thin Film on Insulator (LTOI) - MSE Supplies LLC

MSE PRO 6 Inch Lithium Tantalate Thin Film on Insulator Wafers (LTOI)

  • $ 1,64000

MSE PRO™ 6 Inch Lithium Tantalate Thin Film on Insulator Wafers (LTOI)

MSE Supplies offers 6 inch Lithium Tantalate (LiTaO3) Thin Film on Insulator (LTOI). It typically consists of a thin layer of LiTaO3 on an insulating substrate. The insulator layer between the LTOI thin film and silicon wafer helps to prevent the chance of occurring short circuits and enhancing the material's electrical performance. The LTOI wafer has piezoelectric properties, which makes it an ideal for the conversion of mechanical energy into electrical energy. It is widely used in making surface acoustic wave (SAW) filters, sensors, actuators, and resonators.

Specification:

      General Wafer
      Structure LiTaO3 / Oxide / Poly-Si / Si
      Diameter Φ150 ± 0.2 mm
      Thickness 675 ± 30 μm
      Primary Flat Length 47.5 ± 2 mm
      Wafer Beveling R Type
      LTV < 1.5 μm (20∗20 mm2) / 95%
      TTV < 10 μm
      Bow ± 40 μm
      Warp < 50 μm
      Edge Exclusion 5 mm
      Edge Trimming 2.5 ± 0.5 mm
      Lithium Tantalate Layer
      Thickness 600 ± 50 nm
      Orientation Y42° ± 0.3°
      Front Surface Roughness (Ra) < 1 nm
      Front Surface Scratch

      > 1 cm within 3 ; between 1 cm and 2 mm within 10 total
      Primary Flat Orientation X-axis ± 1°
      Oxide Layer
      Thickness 500 ± 50 nm
      Poly-Si Layer
      Thickness 1000 ± 100 nm  (WA4021) ; 1300 ± 150 nm (WA4022)
      Substrate
      Material Si
      Type / Dopant
      		 P / Boron
      Resistivity > 5000 ohm.cm
      Orientation <100> ± 1° (WA4021) ; <111> ± 1° (WA4022)
      Primary Flat Orientation <110> ± 1° (WA4021) ;  <0-11> ± 1° (WA4022)
      Backside Etched

        Please contact us for bulk order or customized shape, size, thickness and substrate. 

        References:

        1. Wafer-scale fabrication of 42° rotated Y-cut LiTaO3-on-insulator (LTOI) substrate for a SAW resonator. ACS Applied Electronic Materials, 1(8), 1660-1666.

        2. Low-loss lithium tantalate on insulator waveguide towards on-chip nonlinear photonics. In 2022 27th OptoElectronics and Communications Conference (OECC) and 2022 International Conference on Photonics in Switching and Computing (PSC) (pp. 1-3). IEEE.

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