{"product_id":"moorfield-nanocvd-wg-p-compact-cvd-system-with-optional-plasma-module","title":"Moorfield nanoCVD-WG(P) (Compact CVD System with Optional Plasma Module)","description":"\u003cp\u003e\u003cspan data-preserver-spaces=\"true\"\u003e\u003cb\u003eMSE Supplies\u003c\/b\u003e offers \u003c\/span\u003enanoCVD-WG(P) from Moorfield. It \u003cspan data-mce-fragment=\"1\"\u003eis the result of the scaling of this technology to the wafer scale (3” or 4”), together with the addition of plasma-enhanced capability in a cold-walled chamber. While this represents a significant leap in the capabilities of the nanoCVD range, intelligent design means the compact nature of the units has been maintained for efficient location and integration. This compact system with optional plasma module is suitable for applications including graphene \u0026amp; 2D materials, electrodes for photovoltaics, touchscreen displays, high-performance electronics biological, chemical and mechanical sensors, and electrical energy storage.\u003c\/span\u003e\u003c\/p\u003e\n\u003cp data-mce-fragment=\"1\"\u003e\u003cstrong data-mce-fragment=\"1\"\u003eCountry of Origin:\u003c\/strong\u003e\u003cspan data-mce-fragment=\"1\"\u003e Made in UK\u003c\/span\u003e\u003c\/p\u003e\n\u003cp data-mce-fragment=\"1\"\u003e\u003cspan data-mce-fragment=\"1\"\u003e\u003cstrong data-mce-fragment=\"1\"\u003eManufacturer:\u003c\/strong\u003e Moorfield Nanotechnology\u003c\/span\u003e\u003c\/p\u003e\n\u003ch2 data-mce-fragment=\"1\"\u003e\u003cb data-mce-fragment=\"1\"\u003eMain Features:\u003c\/b\u003e\u003c\/h2\u003e\n\u003cul\u003e\n\u003cli\u003eCompact, low-footprint design\u003c\/li\u003e\n\u003cli\u003eWafer-scale synthesis: 3” or 4”\u003c\/li\u003e\n\u003cli\u003e1100°C maximum platen temperature\u003c\/li\u003e\n\u003cli\u003eCold-walled technology\u003c\/li\u003e\n\u003cli\u003eMFC-controlled process gases\u003c\/li\u003e\n\u003cli\u003eOptional plasma module (RF, 13.56MHz)\u003c\/li\u003e\n\u003cli\u003eFully-automatic control of critical conditions\u003c\/li\u003e\n\u003cli\u003eUser-friendly, touchscreen HMI interface\u003c\/li\u003e\n\u003cli\u003eDefine\/save multiple growth recipes\u003c\/li\u003e\n\u003cli\u003ePC connection for data-logging\u003c\/li\u003e\n\u003cli\u003eEquipped for easy servicing\u003c\/li\u003e\n\u003cli\u003eComprehensive safety features\u003c\/li\u003e\n\u003cli\u003eCleanroom compatible\u003c\/li\u003e\n\u003cli\u003eImplements proven nanoCVD technology\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eOptions:\u003c\/p\u003e\n\u003cul\u003e\u003c\/ul\u003e\n\u003cul\u003e\n\u003cli\u003ePlasma module: 150W\/13.56 MHz RF power supply\u003c\/li\u003e\n\u003cli\u003eUp to 4 process gas MFCs\u003c\/li\u003e\n\u003cli\u003eLoad-lock compatible \u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch2\u003e\u003cb\u003eSystem Requirements—Standard Configuration: \u003c\/b\u003e\u003c\/h2\u003e\n\u003cul\u003e\n\u003cli\u003e\u003cspan\u003e Substrates: Typically foils or films (including on wafers) of various metals\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003e Process gases: 25 psi supplies of methane, hydrogen and argon\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003e Service gas: Dry inert (e.g., nitrogen or argon), 60–80 psi supply\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003e Coolant: 18–20°C coolant\/water flow, 3kW cooling power\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003e Power: Single-phase 230V, 50Hz, 16A\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan\u003e Exhaust extraction\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cb\u003eFor accessories and consumables, please \u003c\/b\u003e\u003ca href=\"https:\/\/www.msesupplies.com\/pages\/contact-us\" target=\"_blank\"\u003e\u003cem\u003econtact us\u003c\/em\u003e\u003c\/a\u003e\u003cb\u003e so we can help you choose appropriate products for your needs.\u003c\/b\u003e\u003c\/p\u003e\n\u003ch2\u003eReferences: \u003c\/h2\u003e\n\u003cp\u003e1. \u003ca href=\"https:\/\/onlinelibrary.wiley.com\/doi\/full\/10.1002\/adma.201501600\" target=\"_blank\"\u003e\u003cspan data-mce-fragment=\"1\"\u003eHigh quality monolayer graphene synthesized by resistive heating cold wall chemical vapor deposition. \u003c\/span\u003e\u003ci data-mce-fragment=\"1\"\u003eAdvanced Materials\u003c\/i\u003e\u003cspan data-mce-fragment=\"1\"\u003e 27, no. 28 (2015): 4200-4206\u003c\/span\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cspan data-mce-fragment=\"1\"\u003e2. \u003ca href=\"https:\/\/www.nature.com\/articles\/srep09866?origin=ppub\" target=\"_blank\"\u003eTransparent conductive graphene textile fibers. \u003ci data-mce-fragment=\"1\"\u003eScientific reports\u003c\/i\u003e 5, no. 1 (2015): 1-7\u003c\/a\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cspan data-mce-fragment=\"1\"\u003e3. \u003ca href=\"https:\/\/pubs.acs.org\/doi\/abs\/10.1021\/acsnano.5b01261\" target=\"_blank\"\u003eResidual metallic contamination of transferred chemical vapor deposited graphene. \u003ci data-mce-fragment=\"1\"\u003eACS nano\u003c\/i\u003e 9, no. 5 (2015): 4776-4785\u003c\/a\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cb\u003e\u003c\/b\u003e\u003cem data-mce-fragment=\"1\"\u003e\u003cstrong data-mce-fragment=\"1\"\u003e\u003cb data-mce-fragment=\"1\"\u003eAbout Moorfield: \u003c\/b\u003e\u003c\/strong\u003e\u003cspan data-mce-fragment=\"1\"\u003eMoorfield was incorporated in 1995\u003c\/span\u003e\u003cspan data-mce-fragment=\"1\"\u003e. Moorfield\u003c\/span\u003e\u003c\/em\u003e \u003cspan data-mce-fragment=\"1\"\u003eare a team of scientists and engineers specializing in the design, manufacture, supply, and support of vacuum deposition (PVD and CVD), etching and annealing systems. The systems manufactured by Moorfield are applied for research, product development and batch production. Applications include semiconductors, photovoltaics, superconductors, sensors, optics, graphene and 2D materials. Academic and industrial markets are served worldwide, both direct and through a network of authorized, trained representatives.\u003c\/span\u003e\u003c\/p\u003e\n\u003cp data-mce-fragment=\"1\"\u003e\u003cem data-mce-fragment=\"1\"\u003e\u003cstrong data-mce-fragment=\"1\"\u003eMSE Supplies\u003c\/strong\u003e\u003cspan data-mce-fragment=\"1\"\u003e \u003c\/span\u003eis an authorized distributor for\u003cspan data-mce-fragment=\"1\"\u003e \u003c\/span\u003e\u003cstrong data-mce-fragment=\"1\"\u003eMoorfield Nanotechnology \u003cmeta charset=\"utf-8\"\u003ein the USA.\u003c\/strong\u003e\u003c\/em\u003e\u003c\/p\u003e","brand":"Moorfield Nanotechnology","offers":[{"title":"Default Title","offer_id":39746002059322,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7785\/products\/nanoCVD-WPG-1.jpg?v=1665676213","url":"https:\/\/www.msesupplies.com\/en-de\/products\/moorfield-nanocvd-wg-p-compact-cvd-system-with-optional-plasma-module","provider":"MSE Supplies","version":"1.0","type":"link"}