News — chemical vapor deposition

Chemical Vapor Deposition-Graphene Growth

Posted by Chia-yu Chen on

Chemical vapor deposition (CVD) is widely used in thin films fabrication on a heated substrate through chemical reactions. The deposition steps for CVD can be summarized into the following steps: Gas species transport to the substrate surface Gas species absorption into the surface Reaction occur and deposits products By-product and unreacted species desorbed (Sun et al. 2021) Chemical vapor deposition can better control deposition rate compared to physical vapor deposition, which can provide high quality and uniform film. Using CVD to growing 2D materials such as graphene has been a popular method since it can produce high quality graphene. MSE...

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