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3 inch Sapphire Wafer C-Plane Single or Double Side Polish Al2O3 Single Crystal

  • $ 7990


    Sapphire Wafer, 3 inch, C-plane (0001), Prime Grade

    • Material: High Purity >99.99% single crystal Al2O3
    • Diameter: Φ76.2 mm ± 0.1 mm
    • Thickness: 650 μm ± 25 μm (SSP) , 600 μm or 430 μm ± 25 μm (DSP) 
    • Lattice Parameter: a=4.785 Å, c=12.991 Å
    • Density: 3.98 g/cm3
    • Orientation: C plane (0001) ± 0.3 degree, R-plane (1-102), A-plane (11-20), M-plane (10-10) are available.
    • Primary flat orientation: A-plane ± 0.3 degree
    • Primary flat length: 22.0 mm ± 1 mm
    • Total Thickness Variation (TTV): <15 μm
    • Bow: <15 μm
    • Warp: <15 μm
    • Polishing: single side polished (SSP) front side epi-ready surface Ra < 0.5 nm (AFM), back side fine-ground Ra = 0.8 ~ 1.2 μm, or double side polished (DSP) both front and back sides epi-ready surface Ra < 0.5 nm (AFM)
    • Package: packaged in a class 100 clean room environment, in cassettes of 25 pcs or single wafer containers, under nitrogen atmosphere. 

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