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10 mm x 10 mm 4H N-Type SiC, Research Grade, Silicon Carbide Crystal Substrate

  • $ 8500


10 mm x 10 mm Silicon Carbide Crystal Substrate 4H (0001) N-Type SiC, Research Grade, Double Side Polished, Si face CMP polished (epi ready)

Size

10 mm x 10 mm (+/- 1mm)

Thickness

350 um +/- 25 um (N type)

Crystal Orientation

4 +/- 0.5 deg off axis <0001>

Micropipe Density (MPD) less than 15 cm-2
Doping Concentration

N-type: ~ 1E18/cm3

Electrical Resistivity

4H-N

0.015~0.025 Ohm-cm

Surface Roughness

Polish Ra 1 nm (C face, marked with a dot)

CMP Ra 0.5 nm (Si face)

 

PROPERTIES OF SILICON CARBIDE CRYSTAL MATERIALS

Property

4H-SiC Single Crystal

6H-SiC Single Crystal

Lattice Parameters (Å)

a=3.076

c=10.053

a=3.073

c=15.117

Stacking Sequence

ABCB

ABCACB

Density

3.21

3.21

Mohs Hardness

~9.2

~9.2

Thermal Expansion Coefficient (CTE) (/K)

4-5 x 10-6

4-5 x 10-6

Refraction Index @750nm

no = 2.61

ne = 2.66

no = 2.60

ne = 2.65

Dielectric Constant

c ~ 9.66

c ~ 9.66

Doping Type

N-type or Semi-insulating

N-type or Semi-insulating

Thermal Conductivity (W/cm K @298K)

(N-type, 0.02 ohm-cm)

a~4.2

c~3.7

 

Thermal Conductivity (W/cm K @298K)

(Semi-insulating type)

a~4.9

c~3.9

 

a~4.6

c~3.2

 

Band-gap (eV)

3.23

3.02

Break-Down Electrical Field (V/cm)

3-5 x 106

3-5 x 106

Saturation Drift Velocity (m/s)

2.0 x 105

2.0 x 105

Wafer and Substrate Sizes

Wafers: 2, 3, 4, 6 inch; smaller substrates: 10x10, 20x20 mm, other sizes are available and can be custom-made upon request

Product Grades

A Grade Zero micropipe density (MPD 1 cm-2)

B Grade Production grade (MPD 5 cm-2)

C Grade Research grade (MPD 15 cm-2)

D Grade Dummy grade (MPD 30 cm-2)

 

Price

MSE Supplies offers the best price on the market for high quality SiC wafers and SiC crystal substrates up to six (6) inch diameter. Our price matching policy guarantees you the best price for the SiC crystal products with comparable specifications. CONTACT US today to get your quote.

Customization

Customized SiC crystal products can be made to meet customer's particular requirements and specifications.