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Yttrium Oxide Sputtering Target Y<sub>2</sub>O<sub>3</sub>,  MSE Supplies

Yttrium Oxide Sputtering Target Y2O3

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Specifications for Yttrium Oxide Sputtering Target

Material Type Yttrium Oxide
Symbol Y2O3
Color/Appearance White, Crystalline Solid
Melting Point (°C) 2,410
Theoretical Density (g/cc) 5.01
Z Ratio **1.00
Sputter RF, RF-R
Max Power Density
(Watts/Square Inch)
20*
Type of Bond Indium, Elastomer
Comments Loses oxygen; films smooth and clear.

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