High Vacuum Magnetron Ion Sputtering Coater for SEM Sample Preparation - MSE Supplies LLC

MSE PRO High Vacuum Magnetron Ion Sputtering Coater for SEM Sample Preparation

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MSE Supplies offers a high vacuum magnetron ion sputtering coater that is suitable for spraying gold, platinum, etc., coating on FE-SEM specimens. It uses high quality and constant power magnetron sputtering power supply to ensure constant coating deposition rate. The use of magnetron cathodes is also effective in reducing plasma exposure to the sample, thermal effects and ion bombardment damage. It is widely used to coat non-conductive SEM samples for better imaging. It is also excellent for surface treatment and coating when using other sputtering targets. High vacuum, less than 3Pa can be achieved quickly when using proper vacuum pumps. It is user friendly and easy to operate using touch panel control.

Brand: MSE PRO

Manufacturer: MSE Supplies LLC

MSE Supplies is a leading Sputtering Targets supplier and offers custom-made high purity sputtering targets

Technical Specifications

SKU# MA0599
Vacuum Pump Set Oil free diaphragm pump + molecular pump set
Pumping Speed >0.7m3/h pump + 60 L/S molecular pump
Vacuum Limit <10-3Pa
Working Pressure 0.5-2Pa
Vacuuming Time <5Min
Vacuum Measure Measuring range from atmosphere to 10-3Pa
Gas Control MFC gas mass flow controller (50SCCM Ar)
Chamber Size 150*110mm scratch resistant quartz glass
Magnetron Target Source Target size 50*0.1-3mm (recommended thickness>0.2mm)/ with manual stop
Target source: precious metal source such as Au/Pt or conventional metal such as Cr, W, Ag (with Ar gas)
Sputtering Time Programmable
Operation Method Touch screen control

30kg/480mm length*385width* 434mm high

Power Supply 110-220V AC, 50-60Hz
Power Consumption <500W
Cooling Method Air cooling
Warranty One year limited warranty with lifetime product support