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Sputtering Target Selection for SEM Sample Preparation

Posted by Chia-yu Chen on

Sputter coating has been widely used in SEM sample preparation to make non-conductive SEM sample conductive. To achieve optimal SEM performance, it is critical to control sputter coating quality which is affected by target material, interaction with sample and process parameters. In this article, selection guides for target materials will be discussed. This information is only valid for modern DC magnetron SEM sputter coater. MSE Supplies offers high purity sputtering targets and sputter coaters. Compact Magnetron Ion Sputtering Coater and High Vacuum Magnetron Ion Sputtering Coater are suitable for SEM Sample preparation. MSE Supplies Target material selection Gold (Au) Gold is...

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